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Ushio USH500D 500W Short Arc Mercury Lamp

Ushio USH500D 500W Short Arc Mercury Lamp
  • Ushio USH500D 500W Short Arc Mercury Lamp
Quick Specifications:

Wattage: 500 | Current: 8.5 Amps | Average Life Hours: 800

SKU:
USH500D (5000518)
Manufacturer:
Ushio
Availability:
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Product Description

Ushio USH-500D 500W Short-Arc Mercury Lamp (5000518) – ASML Stepper Replacement

The Ushio USH-500D is a 500-watt short-arc mercury lamp engineered for semiconductor lithography and optical applications requiring stable high-intensity UV output. Designed with spectral peaks at 436 nm, 405 nm, and 365 nm, this lamp delivers precise illumination for demanding stepper systems.

With a 4.5 mm arc gap, an output optimized for uniform irradiation, and a rated life of ~800 hours, the USH-500D is a direct replacement for ASML Stepper Model 5000/50 and equivalent to the Osram HBO500W/A.

 

Compatibility / Equipment Use

  • ASML Stepper: Model 5000/50

  • Equivalent Lamp: Osram HBO500W/A

  • Semiconductor photolithography systems

  • Optical and UV-based analytical equipment

 

Features & Benefits

  • High UV output at key lithography wavelengths (365/405/436 nm)

  • Compact 4.5 mm arc gap for precise and uniform exposure

  • Designed for stepper and lithography systems (ASML 5000/50)

  • Rated for ~800 hours to reduce downtime and replacement frequency

  • Equivalent to Osram HBO500W/A for easy cross-reference sourcing

 

⚠️ Safety Notice
Contains mercury and emits strong UV radiation. Operate only in enclosed, interlocked housings designed for high-intensity short-arc lamps. Allow lamp to fully cool before handling.

 

Data Sheet Download: 
USH500D

 

Other Details

Manufacturer Ordering Code:
5000518
Lamp Type:
Short Arc Mercury Lamp
Wattage:
500 W
Nominal Current:
8.5 A
Cold Arc Gap:
4.5 mm
Average Life:
~800 hours (application dependent)
Spectral Peaks:
436 nm, 405 nm, 365 nm
Burning Position:
±15°

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